Microrobots are used nowadays in several fields of application, especially in mini invasive surgery. However, they are rather difficult to be constructed, and the traditional machining tools are not adequate to build their smaller parts. The construction of microrobots is even harder if more than one D.O.F. are required, because these systems are more complicated. This paper deals with the development of a 3 D.O.F. planar micro platform with a remote system of actuation. The new approach of design and manufacturing is based on two innovative solutions: a) the adoption of the technologies used to build MEMS, Micro Electro Mechanical Systems; b) the introduction of new flexural hinge to develop compliant micro mechanisms. The new concept of flexural hinge is described in the paper, also from a theoretical point of view. Several examples of possible structures are, then, proposed and analyzed, together with their remote wire actuation systems. Finite Element Analysis (FEA) has been also adopted to analyze the system performance under small deformations and large deflections. The principle of fabrication is, finally, described. The process consists of a sequence of single steps which have allowed to achieve an overall maximum size down to 3-4 mm and the minimum thickness of the smaller components down to 50 μm.

The development of a MEMS/NEMS-based 3 D.O.F. compliant micro robot

Matteo Verotti
2011

Abstract

Microrobots are used nowadays in several fields of application, especially in mini invasive surgery. However, they are rather difficult to be constructed, and the traditional machining tools are not adequate to build their smaller parts. The construction of microrobots is even harder if more than one D.O.F. are required, because these systems are more complicated. This paper deals with the development of a 3 D.O.F. planar micro platform with a remote system of actuation. The new approach of design and manufacturing is based on two innovative solutions: a) the adoption of the technologies used to build MEMS, Micro Electro Mechanical Systems; b) the introduction of new flexural hinge to develop compliant micro mechanisms. The new concept of flexural hinge is described in the paper, also from a theoretical point of view. Several examples of possible structures are, then, proposed and analyzed, together with their remote wire actuation systems. Finite Element Analysis (FEA) has been also adopted to analyze the system performance under small deformations and large deflections. The principle of fabrication is, finally, described. The process consists of a sequence of single steps which have allowed to achieve an overall maximum size down to 3-4 mm and the minimum thickness of the smaller components down to 50 μm.
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Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11567/940810
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