Application of micro-channel cooling to the local thermal management of detectors electronics for particle physics

Micro-channel cooling is gaining considerable attention as an alternative technique for cooling of high energy physics detectors. This is of particular interest for future trackers, where large silicon surfaces are involved and the amount of material crossed by particles must be drastically reduced. Combining the versatility of standard micro-fabrication processes with the high thermal efficiency typical of micro-fluidics, it is possible to produce effective thermal management devices well adapted to different detector-specific applications. Three application cases are presented, which take into account different detector constraints and different refrigerant types: the first one being optimized for low temperature single-phase liquid flow, and the other two for evaporative cooling: one for low pressure/room temperature two-phase flow, and one for high pressure/low temperature two-phase flow.