The electropolishing of a boron-doped diamond ~BDD! film deposited by chemical vapor deposition has been studied in acetic acid-H2SO4 media. The electropolished surface has been characterized by scanning electron microscopy ~SEM!, X-ray photoelectron spectroscopy ~XPS!, and electrochemical measurements. The results have shown that in 1 M H2SO4 no polishing of the surface occurred even after prolonged time; on the contrary, in electrolyte containing 3 M acetic acid in 1 M H2SO4 the morphology changed rapidly. The surface became smoother and the roughness decreased as the typical results of a polishing process. All the non-diamond impurities were also removed by the electropolishing treatment in acetic acid media.
Electrochemical polishing of boron-doped diamond in organic media
PANIZZA, MARCO;
2003-01-01
Abstract
The electropolishing of a boron-doped diamond ~BDD! film deposited by chemical vapor deposition has been studied in acetic acid-H2SO4 media. The electropolished surface has been characterized by scanning electron microscopy ~SEM!, X-ray photoelectron spectroscopy ~XPS!, and electrochemical measurements. The results have shown that in 1 M H2SO4 no polishing of the surface occurred even after prolonged time; on the contrary, in electrolyte containing 3 M acetic acid in 1 M H2SO4 the morphology changed rapidly. The surface became smoother and the roughness decreased as the typical results of a polishing process. All the non-diamond impurities were also removed by the electropolishing treatment in acetic acid media.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.