The lensless digital in-line microscope is proposed as a simple tool for post-production inspection of metallic film patterns on silicon wafers. Transmission holographic imaging is achieved by using a superluminescent diode emitting in the near infrared coupled into a single-mode high numerical aperture optical fiber and an infrared vidicon camera. Images of 300 nm thick vapor-deposited aluminum bolometers are presented.
Infrared lensless holographic microscope with a vidicon camera for inspection of metallic evaporations on silicon wafers
REPETTO, LUCA;CHITTOFRATI, ROBERTO;PIANO, EMANUELE FELICE;PONTIGGIA, CARLO
2005-01-01
Abstract
The lensless digital in-line microscope is proposed as a simple tool for post-production inspection of metallic film patterns on silicon wafers. Transmission holographic imaging is achieved by using a superluminescent diode emitting in the near infrared coupled into a single-mode high numerical aperture optical fiber and an infrared vidicon camera. Images of 300 nm thick vapor-deposited aluminum bolometers are presented.
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