We investigate the effect of different voltage waveforms on the growth of titanium oxide nanodots using Atomic Force Microscope (AFM) nanolithography. The resulting oxide features are compared by taking into account the current data detected during oxidation under the application of constant and linear ramp voltages. The experimental analysis of current waveforms during oxidation upon a constant bias voltage gives quantitative criteria to reduce space charge effects. The use of ramp voltages gives higher flexibility on the control of volume and aspect ratio of oxide features by varying the duty cycle.
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