The rich spectrum of functionalities exhibited by oxide thin films is an appealing feature for the development of micro and nanomechanical devices [1,2]. MEMS made of heterostructures of crystalline oxide materials having targeted physical properties may be applied as sensors having different integrated functionalities. In this work, we explore the feasibility of manganite thin film based epitaxial MEMS for magnetic micromechanical sensing. We investigate the electromechanical properties of LSMO freestanding structures for future applications in the field of micromechanical magnetic sensors.
Towards Micromechanical Sensors with (La,Sr)MnO3 Epitaxial Films
MANCA, NICOLA;MARRE', DANIELE
2016-01-01
Abstract
The rich spectrum of functionalities exhibited by oxide thin films is an appealing feature for the development of micro and nanomechanical devices [1,2]. MEMS made of heterostructures of crystalline oxide materials having targeted physical properties may be applied as sensors having different integrated functionalities. In this work, we explore the feasibility of manganite thin film based epitaxial MEMS for magnetic micromechanical sensing. We investigate the electromechanical properties of LSMO freestanding structures for future applications in the field of micromechanical magnetic sensors.
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