This paper presents a new NEMS-Technology based device, which transduces micro-metric linear displacements of a tip probe into capacity variations of a rotary comb-drive. The mechanical structure of this device is obtained through three basic steps. Firstly, the pseudo-rigid body equivalent mechanism (PRBM) is obtained by optimizing a straight-line path generator (D-gauge mechanism). Then, the PRBM is transformed into a compliant structure by replacing revolute joints with flexure hinges and by adding a differential comb-drive sensible to variation capacity. Finally, the geometry is transferred to the device by means of a process based on electron beam lithography.

A new NEMS Based Linear-to-Rotary Displacement-Capacity Transducer

Verotti, M;
2019-01-01

Abstract

This paper presents a new NEMS-Technology based device, which transduces micro-metric linear displacements of a tip probe into capacity variations of a rotary comb-drive. The mechanical structure of this device is obtained through three basic steps. Firstly, the pseudo-rigid body equivalent mechanism (PRBM) is obtained by optimizing a straight-line path generator (D-gauge mechanism). Then, the PRBM is transformed into a compliant structure by replacing revolute joints with flexure hinges and by adding a differential comb-drive sensible to variation capacity. Finally, the geometry is transferred to the device by means of a process based on electron beam lithography.
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11567/1010200
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