Design and Fabrication of POSFET Devices for Tactile Sensing

This work presents the design and fabrication of novel piezoelectric polymer-FET touch sensing devices. With thin piezoelectric polymer (PVDF-TrFE) film directly spun and processed in situ on the gate area of MOS transistor, the device can also be called as POSFET (Piezoelectric Oxide Semiconductor Field Effect Transistor) touch sensing device. The integral POSFET “sensotronics” unit, comprising of transducer and the transistor, senses and conditions the signal at ‘same site’. Challenging issues like in situ poling of piezoelectric polymer film, without damaging or altering the characteristics of underlying MOS devices, have been successfully dealt with.